Index of ftp://ftp.nist.gov/pub/pml/villarrubia

[DIR] Parent Directory

[TXT] Bunday_et_al_LEROptimalParams_5375_p515_2004.pdf  856.21Kb  January 26 2006
[TXT] Dongmo_etal_ExpTestBlindRecon_Ultramicrosc85_2000_p141.pdf  425.92Kb  July 10 2009
[TXT] Dongmo_etal_TipCharForSPMWidthMetrol_CharactAndMetrologyForULSI_AIPConfProc449_1998_p843.pdf  221.17Kb  July 10 2009
[ZIP] JMONSEL_distribution_3_18_2021.zip  532.89Mb  March 19 2021
[ZIP] LinescanMovie.zip  2.99Mb  October 20 2008
[TXT] LowneyMarx_UserManualMONSEL1_NISTIR400-95_1994.pdf  3.59Mb  October 24 2007
[ZIP] MONSEL.zip  4.77Mb  July 6 2010
[TXT] QianVillarrubia_Gen3DImSimSurfReconSPMDexel_Ultramicroscopy108_2007_p29_authorsFormat.pdf  795.85Kb  February 12 2008
[ZIP] RoughnessWrapped4Final.zip  6.74Mb  February 14 2017
[ZIP] RoughnessWrappedVirtualSamples.zip  13.37Mb  April 7 2017
[TXT] TanakaVillarrubiaVladar_FocusVariation_SPIE4689_p144_2005.pdf  628.44Kb  January 30 2006
[TXT] VillarrubiaBunday_UnbiasedLWR_5752_p480_2005.pdf  741.96Kb  January 26 2006
[TXT] VillarrubiaDing_SensSEMWidthToModel_JMM8_2009_a033003.pdf  488.60Kb  March 24 2010
[TXT] VillarrubiaRitchieLowney_MCModelingSEin3D_ProcSPIE6518_2007.pdf  519.92Kb  October 2 2007
[TXT] VillarrubiaTondareVladar_VirtualRoughSamp_ProcSPIE_2016Preprint.pdf  462.65Kb  April 1 2016
[TXT] VillarrubiaVladarPostek_SimStudy_JM4_2005.pdf  584.12Kb  January 26 2006
[TXT] Villarrubia_LERLWRissues_ProcCharMetULSI_p386_2005.pdf  710.39Kb  January 30 2006
[TXT] Villarrubia_et_al_ResistSEMMetrol_SPIE5375_p199_2004.pdf  1.02Mb  January 26 2006
[TXT] Villarrubia_et_al_SEManalogScatterometry_SPIE4689_35_p304_2002.pdf  776.15Kb  January 26 2006
[TXT] Villarrubia_et_al_SEMwModelBasedLib_SIA37_p951_2005.pdf  390.74Kb  January 26 2006
[TXT] Villarrubia_etal_EdgeDetPolycrystalSiLinesonGateOxide_ProcSPIE4344_2001_p147.pdf  385.26Kb  August 25 2010
[TXT] Villarrubia_etal_ProximityErrorsContourMetrology_SPIEAdvLitho2010.pdf  768.36Kb  March 8 2010