Index of ftp://ftp.nist.gov/pub/pml/villarrubia
Parent Directory
Bunday_et_al_LEROptimalParams_5375_p515_2004.pdf
856.21Kb
January 26 2006
Dongmo_etal_ExpTestBlindRecon_Ultramicrosc85_2000_p141.pdf
425.92Kb
July 10 2009
Dongmo_etal_TipCharForSPMWidthMetrol_CharactAndMetrologyForULSI_AIPConfProc449_1998_p843.pdf
221.17Kb
July 10 2009
JMONSEL_distribution_3_18_2021.zip
532.89Mb
March 19 2021
LinescanMovie.zip
2.99Mb
October 20 2008
LowneyMarx_UserManualMONSEL1_NISTIR400-95_1994.pdf
3.59Mb
October 24 2007
MONSEL.zip
4.77Mb
July 6 2010
QianVillarrubia_Gen3DImSimSurfReconSPMDexel_Ultramicroscopy108_2007_p29_authorsFormat.pdf
795.85Kb
February 12 2008
RoughnessWrapped4Final.zip
6.74Mb
February 14 2017
RoughnessWrappedVirtualSamples.zip
13.37Mb
April 7 2017
TanakaVillarrubiaVladar_FocusVariation_SPIE4689_p144_2005.pdf
628.44Kb
January 30 2006
VillarrubiaBunday_UnbiasedLWR_5752_p480_2005.pdf
741.96Kb
January 26 2006
VillarrubiaDing_SensSEMWidthToModel_JMM8_2009_a033003.pdf
488.60Kb
March 24 2010
VillarrubiaRitchieLowney_MCModelingSEin3D_ProcSPIE6518_2007.pdf
519.92Kb
October 2 2007
VillarrubiaTondareVladar_VirtualRoughSamp_ProcSPIE_2016Preprint.pdf
462.65Kb
April 1 2016
VillarrubiaVladarPostek_SimStudy_JM4_2005.pdf
584.12Kb
January 26 2006
Villarrubia_LERLWRissues_ProcCharMetULSI_p386_2005.pdf
710.39Kb
January 30 2006
Villarrubia_et_al_ResistSEMMetrol_SPIE5375_p199_2004.pdf
1.02Mb
January 26 2006
Villarrubia_et_al_SEManalogScatterometry_SPIE4689_35_p304_2002.pdf
776.15Kb
January 26 2006
Villarrubia_et_al_SEMwModelBasedLib_SIA37_p951_2005.pdf
390.74Kb
January 26 2006
Villarrubia_etal_EdgeDetPolycrystalSiLinesonGateOxide_ProcSPIE4344_2001_p147.pdf
385.26Kb
August 25 2010
Villarrubia_etal_ProximityErrorsContourMetrology_SPIEAdvLitho2010.pdf
768.36Kb
March 8 2010